Kev Ua Haujlwm Precision ntawm Cheebtsam
Cov lim dej High-Q xav tau qhov tseeb siab heev hauv kev siv tshuab ua cov khoom. Txawm tias qhov sib txawv me me ntawm qhov loj me, cov duab, lossis qhov chaw tuaj yeem cuam tshuam rau qhov ua tau zoo ntawm cov lim dej thiab Q-factor. Piv txwv li, hauv cov lim dej cavity, qhov ntev thiab qhov roughness ntawm qhov cavity ncaj qha cuam tshuam rau Q-factor. Yuav kom ua tiav Q-factor siab, cov khoom yuav tsum tau ua kom raug, feem ntau xav tau cov thev naus laus zis tsim khoom siab heev xws li kev ua CNC machining lossis laser txiav. Cov thev naus laus zis tsim khoom ntxiv xws li kev xaiv laser melting kuj tseem siv los txhim kho qhov tseeb ntawm cov khoom thiab rov ua dua.

Kev Xaiv Khoom Siv thiab Kev Tswj Xyuas Zoo
Kev xaiv cov khoom siv rau cov lim dej siab-Q yog qhov tseem ceeb heev. Cov ntaub ntawv uas muaj kev poob qis thiab ruaj khov siab yog qhov yuav tsum tau ua kom txo qis kev poob zog thiab xyuas kom meej tias muaj kev ua haujlwm ruaj khov. Cov ntaub ntawv feem ntau suav nrog cov hlau ntshiab siab (piv txwv li, tooj liab, txhuas) thiab cov dielectrics qis-poob (piv txwv li, alumina ceramics). Txawm li cas los xij, cov ntaub ntawv no feem ntau kim thiab nyuaj rau ua. Tsis tas li ntawd, kev tswj xyuas zoo nruj yog qhov tsim nyog thaum xaiv cov ntaub ntawv thiab ua kom ntseeg tau tias muaj kev sib xws hauv cov khoom siv. Txhua yam tsis huv lossis qhov tsis zoo hauv cov ntaub ntawv tuaj yeem ua rau poob zog thiab txo qis Q-factor.

Kev Sib Dhos thiab Kev Kho Kom Zoo
Cov txheej txheem sib dhos raucov lim dej siab-Qyuav tsum tau meej heev. Cov khoom yuav tsum tau muab tso rau qhov chaw thiab sib dhos kom raug kom tsis txhob muaj qhov tsis sib xws lossis qhov sib txawv, uas tuaj yeem ua rau lub lim dej ua haujlwm tsis zoo. Rau cov lim dej siab-Q uas tuaj yeem kho tau, kev koom ua ke ntawm cov txheej txheem kho nrog lub qhov lim dej ua rau muaj kev cov nyom ntxiv. Piv txwv li, hauv cov lim dej dielectric resonator nrog MEMS tuning mechanisms, qhov loj ntawm MEMS actuators me dua li resonator. Yog tias resonator thiab MEMS actuators raug tsim sib cais, cov txheej txheem sib dhos ua rau nyuaj thiab kim, thiab me ntsis tsis sib xws tuaj yeem cuam tshuam rau lub lim dej kho kev ua haujlwm.

Ua tiav Bandwidth thiab Tunability tas mus li
Tsim ib lub lim dej siab-Q tunable nrog bandwidth tas li yog qhov nyuaj. Txhawm rau kom tswj tau bandwidth tas li thaum lub sijhawm tuning, sab nraud loaded Qe yuav tsum hloov pauv ncaj qha nrog qhov nruab nrab zaus, thaum inter-resonator couplings yuav tsum hloov pauv inversely nrog qhov nruab nrab zaus. Feem ntau cov lim dej tunable tau tshaj tawm hauv cov ntaub ntawv qhia txog kev ua haujlwm poob qis thiab bandwidth hloov pauv. Cov txheej txheem xws li kev sib npaug hluav taws xob thiab sib nqus couplings siv los tsim cov lim dej tunable bandwidth tas li, tab sis ua tiav qhov no hauv kev xyaum tseem nyuaj. Piv txwv li, lub lim dej TE113 dual-hom qhov cavity tunable tau tshaj tawm tias ua tiav Q-factor siab ntawm 3000 hla nws qhov ntau thiab tsawg tuning, tab sis nws qhov kev hloov pauv bandwidth tseem mus txog ± 3.1% hauv qhov me me tuning ntau yam.

Kev Tsim Khoom Tsis Zoo thiab Kev Tsim Khoom Loj
Kev tsim kho tsis zoo xws li cov duab, qhov loj me, thiab qhov chaw sib txawv tuaj yeem ua rau muaj zog ntxiv rau hom, ua rau muaj kev sib txuas hom ntawm ntau qhov chaw hauv k-qhov chaw thiab tsim cov channel radiative ntxiv, yog li txo qhov Q-factor. Rau cov khoom siv nanophotonic dawb-qhov chaw, thaj chaw tsim khoom loj dua thiab cov channel poob ntau dua uas cuam tshuam nrog nanostructure arrays ua rau nws nyuaj rau ua tiav cov Q-factors siab. Thaum cov kev ua tiav ntawm kev sim tau ua pov thawj Q-factors siab txog 10⁹ hauv cov microresonators on-chip, kev tsim cov lim dej siab-Q feem ntau kim thiab siv sijhawm ntau. Cov txheej txheem zoo li grayscale photolithography siv los tsim cov lim dej wafer-scale, tab sis kev ua tiav cov Q-factors siab hauv kev tsim khoom loj tseem yog qhov nyuaj.

Kev Sib Pauv Ntawm Kev Ua Tau Zoo thiab Tus Nqi
Cov lim dej High-Q feem ntau xav tau cov qauv tsim nyuaj thiab cov txheej txheem tsim khoom siab kom ua tiav kev ua tau zoo dua, uas ua rau cov nqi tsim khoom nce ntxiv. Hauv kev siv ua haujlwm, muaj qhov xav tau los sib npaug kev ua tau zoo thiab tus nqi. Piv txwv li, silicon micromachining thev naus laus zis tso cai rau kev tsim khoom pheej yig ntawm cov resonators thiab cov lim dej ntawm cov zaus qis dua. Txawm li cas los xij, kev ua tiav cov Q-factors siab hauv cov zaus siab dua tseem tsis tau tshawb nrhiav. Kev sib xyaw ua ke ntawm silicon RF MEMS tuning thev naus laus zis nrog cov txheej txheem txhaj tshuaj molding pheej yig muab kev daws teeb meem rau kev tsim khoom pheej yig, pheej yig ntawm cov lim dej high-Q thaum tswj kev ua tau zoo.